Cause:

• The load conditions exceed the specified values(mass, inertia).
• The load condition settings are not suitable(HNDDAT and WRKDAT settings are not consistent with the load).
• The tip is being used near a singular point.
• Acceleration or deceleration is too sudden.
• The installation stand is not rigid enough.
• Vibrations from nearby equipment are being felt.

Measures:

• Check the load conditions and the parameter settings. Please also try to adjust the acceleration/deceleration time, the speed, and the teaching point where necessary.
• Check the condition of the unit's installation(including external vibrations).