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Compliance with SEMI-F47 for L series power supply module
How do I comply with SEMI-F47 when using the L series power supply module?
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Answer
Use the following power supply module with an input power of 200 VAC for compliance with SEMI-F47.
- Power supply module: L61P
With an input power of 100 VAC, supply power via an uninterruptible power supply (UPS) to the programmable controller system for compliance with SEMI-F47. Use an online UPS with voltage distortion of 5% or less.
(1) Connectable online Mitsubishi UPS products
- FREQUPS-V series
(2) Connectable Mitsubishi UPS products other than online types
- FREQUPS-A series
- FREQUPS-F series (serial number P or later)
- Power supply module: L61P
With an input power of 100 VAC, supply power via an uninterruptible power supply (UPS) to the programmable controller system for compliance with SEMI-F47. Use an online UPS with voltage distortion of 5% or less.
(1) Connectable online Mitsubishi UPS products
- FREQUPS-V series
(2) Connectable Mitsubishi UPS products other than online types
- FREQUPS-A series
- FREQUPS-F series (serial number P or later)
- Product Name
- MELSEC-L Series
- Series
- Power Supply
