Although the connection with FX2N series I/O modules, FX2 series intelligent function modules, and FX3 series special adater is not possible, FX3 series intelligent function modules can be connected with FX5 CPU modules.
However, bus conversion module is required. (FX5-CNV-BUS/FX5-CNV-BUSC).
You can check the device configuration of the FX5 CPU module with the model selection tool.